I can almost guarantee it was the Catholic Church who made the use of Torture Devices and Machines widespread. They used them against anyone they felt were a threat to them and they're money/power by claiming sacrilege of the Catholic faith. However torture machines have been around way before that I believe almost every ancient civilization has utilized some form of torture against their enemies during practically every time period.
not sure what you define as a torture "machine" but the first mechanical devices that were built solely for torture were used in the Spanish Inquisition. torture has been around since the dawn of man though... as soon as the first crime was committed, there had to be a punishment for it